High Voltage for Ion Implantation

Ion Implantation is used for insertion of Ions into specific materials (doping) to achieve a specific change of the characteristics of the basic material. This method often used in the semiconductor industry. Several steps of this method (i.e. Acceleration, Separation of Ions, Deflection of Ions) require high voltage power supplies.

High Voltage for Ion Implantation: iseg DPS series

The DPS series includes high voltage power supply modules with output voltages up to 6 kV in a compact and easily mountable housing. The maximum power is 12 W, polarity is switchable. The HV output is finished by HV cable or by SHV connector. The version the supply and control voltages are connected either via a D-SUB 9 connector or H15 connector (3U cassette).

An internal reference voltage can be used to control the output voltage with help of an external potentiometer. Analog I/O is provided for remote monitoring and control. To protect connected loads hardware limits for voltage and current can be defined. Our patented resonance converter technology and the metal box shielding guarantee lowest EMI.
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High Voltage for Ion Implantation: iseg EBS series

The bipolar EBS distribution modules are multichannel high voltage power supplies in MMS- and MMC system (Eurocard format) with full 4-quadrant capabilities. The EBS can be used as bipolar current sink and source, which perfectly covers requirements of electron optical systems or capacitive loads. The EBS is built in common floating ground principle to reduce voltage noise level.

With up to 16 channels each single channel has an independent voltage control up to 3 kV channel-voltage-difference. The EBS configuration of output voltage and current can be customized on request. The module is made of high precision components as 24 bit ADC and 20 bit DAC and provides comprehensive security features.

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High Voltage for Ion Implantation: iseg EDS series

The cost effective EDS distribution modules are multichannel high voltage power supplies in MMS-system (Eurocard format). It is available as Standard version and as Low Cost version with reduced resolution and precision of current measurement. The EDS is comes with common floating ground to reduce voltage noise level.

With up to 48 channels each single channel has an independent voltage control. The module is made of high precision components as 24 bit ADC and 20 bit DAC and provides comprehensive security features.
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High Voltage for Ion Implantation: iseg EHQ series

The established EHQ single channel HV module is cased in compact iseg MME-system (Eurocard format). EHQ series HV supplies are front panel controllable with a precise 10-turn potentiometer for voltage setting and a LCD to display voltage or current. For remote control EHQ is equipped with many interfaces (USB, RS232, CAN, optional analog I/O). The voltage ramp is hardware fixed and can be changed in remote operation. The high voltage output is short circuit and overload protected, an INHIBIT input over external digital signal switches the HV off.
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High Voltage for Ion Implantation: iseg HPS series

HPS devices are digital controlled AC driven high voltage power supplies with high power density at best output characteristics. The processor controlled supplies can fl exibly be adapted to any kind of application by confi guring many options.

PWM controlled output parameters, small ripple and noise and stored energy, up to 93% effi ciency and almost loss free switching of semiconductors makes HPS devices the most advanced AC/DC HV power supply for industrial and research applications.
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High Voltage for Ion Implantation: iseg MMC Crates series

ECH crates of 124/128/12A in MMC design are ideally suited for mobile and stationary usage by it´s compact construction. In MMC system crates analog controlled DC/DC converters of CPS, DPS or EPS series can be digitally controlled by the MICC crate controller. Thereby versatile HV supply systems can be composed, which are either powerful (EPS), highly precise (DPS) or providing a cost saving coverage of a wide HV range (CPS).
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High Voltage for Ion Implantation: iseg MMS Crates series

ECH 242 / 224 / 244 / 238 is the classic iseg crate series in MMS system. It is available as desktop version with 2 or 4 module slots or in 19“ full-size rack format with 8 module slots. With 1,200 W power, optional integrable fan-unit and optional UPS unit the ECH 238 is perfectly prepared to reliably handle demanding HV supply tasks. The crates can be clustered and remotely controlled. The iseg ECH 5xA crate series provides 10 iseg multichannel module slots, can be equipped with Low- and High Voltage modules (version dependend) and work with CC24, CC23 or Mpod Controller. With two external electrical isolated CAN lines, powerful 1,200 W and optional UPS.
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High Voltage for Ion Implantation: iseg NHR series

The iseg NHR modules are multi-channel high voltage power supplies in 1/12 NIM standard cassette format. The NHR provides up 4 channels, each with an independent voltage and current control and electronically reversible polarity. The 6kV channel provides a maximum versatility: with three electronically switchable HV-generation modes it can supply 4mA up to voltages of 2kV, 3mA up to 4kV and 2mA up to 6kV. Alternatively the NHR can be equipped with cost efficient 2kV/6mA channels. Several NHR modules can be daisy-chained by CAN and controlled with a single USB connection or by an iseg iCS system. The hardware is made of best components such as 24 bit ADC and 20 bit DAC, the approved front panel control of the NHS series with TFT display allows userfriendly intuitive operation. The  NHR is equipped with a comprehensive set of security features like overvoltage and short circuit protection, hardware limits and much more.
NHR

High Voltage for Ion Implantation: iseg NHS series

The iseg NHS modules of this series are multi channel high voltage power supplies in 1/12 NIM standard cassette format. With up to 6 channels each single channel has an independent voltage and current control. By offering different configurations and options this module perfectly covers various types of applications such as detector supply, experimental setup or lab use.

Several NHS modules can be daisychained by CAN and controlled with a single USB connection or by iseg iCS system. The module is made of best components as 24 bit ADC and 20 bit DAC, an excellent front panel control with TFT display plus comprehensive security features.
NHS

High Voltage for Ion Implantation: iseg SHR series

The new SHR series represents standalone High Precision HVlabratory SMU - Source Measuring Unit - equipped with thefinest iseg HV generation technology and iCS control system.The SHR provides up to 4 HV-channels, each with an independentvoltage and current control and reversible polarity.A completely new developed flexible 6kV channel provides amaximum versatility:With three electronically switchable HV-generation modes it cansupply 4 mA up to voltages of 2 kV, 3 mA up to 4 kV or 2 mAup to 6 kV. Alternatively the SHR can be equipped with costefficient 2kV/6mA fixed channels.A high quality 4.3“ TFT shows detailed information and canbe controlled by capacitive touch. All comprehensive features likelogging, graphical display and customer specific plugins are alsoavailable by the precise jog-wheel and buttons.
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High Voltage for Ion Implantation: iseg THQ series

The inexpensive and robust desktop high voltage power supplies are equipped with proven high voltage modules of the CPS, DPS and EPS series. The units are available with either 1, 2 or 3 high voltage channels in many variations and combinations. The output voltage is controlled via the 10-turn potentiometer, the USB interface or the analog I/O. Output voltage and current is displayed on a 2 line LCD per channel, located on the front panel.
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High Voltage for Ion Implantation: iseg VDS series

The cost effective VDS distribution modules are multichannel high voltage power supplies in VME standard. The VDS is built in common floating ground principle to reduce voltage noise level. With up to 24 channels each single channel has an independent voltage control. The module is made of high precision components as 24 bit ADC and 20 bit DAC and provides comprehensive security features.
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High Voltage for Ion Implantation: iseg VHQ series

The established VHQ dual channel HV module is cased in compact VME standard. VHQ series HV supplies are front panel controllable with a precise 10-turn potentiometer per channel for voltage setting and a common LCD for display of voltage or current. For remote control the VHQ is fully compliant with VMEbus.

The voltage ramp is hardware fixed and can be changed in remote operation. The high voltage output is short circuit and overload protected, an INHIBIT input over external digital signal switches the HV off.
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High Voltage for Ion Implantation: iseg VHS series

The VHS modules of this series are multichannel high voltage power supplies in VME standard. With up to 12 channels each single channel has an independent voltage and current control. Being offered in different configurations this module perfectly covers various types of applications such as detector supply, experimental setup or lab use. The module is made of high precision components as 24 bit ADC and 20 bit DAC and provides comprehensive security features.
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